Doping process in silicon epitaxy : transfer function and physicochemical model /

Doping process in silicon epitaxy : transfer function and physicochemical model /

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Bibliographic Details
Main Author: Reif, Rafael
Corporate Author: Stanford University Department of Electrical Engineering
Format: Thesis Book
Language:English
Published: 1978
Subjects:
Epitaxy
Semiconductor doping
Silicon
Thin films

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Stanford University

Holdings details from Stanford University
Call Number: 3781 1979 R
ISIL:US-CST

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