Defect recognition and image processing in semiconductors 1997 : proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997 /
Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and i...
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