Defect recognition and image processing in semiconductors 1997 : proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997 /

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and i...

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Bibliographic Details
Corporate Author: International Conference on Defect Recognition and Image Processing in Semiconductors Templin, Germany
Other Authors: Donecker, J, Rechenberg, I
Format: Conference Proceeding Book
Language:English
Published: [Place of publication not identified] : Routledge, 2017
Series:Institute of Physics conference series ; no. 160
Subjects:

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Columbia University

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Call Number: EBOOKS