Ion Implantation and Activation - Volume 1

Ion Implantation and Activation presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories. Chapters in the book explain, in depth, various topics such as Pearson functions, LSS theory...

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Bibliographic Details
Main Author: Suzuki, Kunihiro
Format: Book
Language:English
Published: Sharjah : Bentham Science Publishers, 2013
Series:Ion Implantation and Activation
Ion Implantation and Activation
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Stanford University

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Call Number: INTERNET RESOURCE