Reactive sputter deposition /
The use of thin films is continuously expanding. In the family of physical vapour deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process are described in detail, allowing the reader to understand t...
| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer,
[2008], ©2008
Berlin : c2008 Berlin ; New York : c2008 |
| Series: | Springer series in materials science ;
109 Springer series in materials science ; 109 Springer series in materials science ; v. 109 |
| Subjects: |
Internet
Massachusetts Institute of Technology
| Call Number: |
TS695.R43 2008 |
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Harvard University
| Call Number: |
TS695 .R433 2008 |
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Cornell University
| Call Number: |
TS695 .R43 2008 |
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Princeton University
| Call Number: |
TS695 .R433 2008 |
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Columbia University
| Call Number: |
TS695 .R43 2008g |
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