Fourth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) : 1999 proceedings : February 11-12, 1999, Santa Clara Marriott Hotel, Santa Clara, CA : a specialty conference of Institute on Microelectronics Inter-chip Connection
| Corporate Authors: | , |
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Tampa, Fla. :
VMIC,
1999
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| Subjects: |