On the development of a low-cost lithographic interferometer /
Interference lithography is a technique for making one- and two-dimensional periodic nanostructures using interference of two coherent light beams. Despite their successes, the size, maintenance, and cost of interference lithography tools have prevented periodic nanostructures from being ubiquitous...
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| Format: | Thesis Book |
| Language: | English |
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c2010
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Internet
This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.Massachusetts Institute of Technology
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THESIS Thesis E.E. 2010 S.M. |
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