The Auger sputter profiling technique and its application to studies of the Si-SiO₂ interface /

Bibliographic Details
Main Author: Schwarz, S. A
Corporate Author: Stanford University Department of Electrical Engineering
Format: Thesis Book
Language:English
Published: 1979
Subjects:
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245 1 4 |a The Auger sputter profiling technique and its application to studies of the Si-SiO₂ interface /  |c by Steven Allan Schwarz 
260 |c 1979 
300 |a xii, 166 p. :  |b graphs 
500 |a Submitted to the Department of Electrical Engineering 
502 |g Thesis  |b Ph.D  |c Stanford University  |d 1980. 
504 |a Includes bibliographical references 
650 0 |a Auger effect 
650 0 |a Cathode sputtering (Plating process) 
650 0 |a Semiconductor doping 
650 0 |a Silica 
650 0 |a Silicon  |x Surfaces 
710 2 |a Stanford University  |b Department of Electrical Engineering. 
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