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01659nam a2200325 i 4500 |
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694a7740-1936-4060-9b71-1a2b136a5a39 |
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20240926000000.0 |
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800917s1979 xx a b 000 0 eng d |
035 |
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|a (CStRLIN)CSUG18469310-B
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035 |
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|a (OCoLC-I)272077828
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|a (OCoLC-M)38605204
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035 |
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|a (Sirsi) ADZ1288
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040 |
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|a CSt
|c CSt
|d OrLoB
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100 |
1 |
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|a Schwarz, S. A
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245 |
1 |
4 |
|a The Auger sputter profiling technique and its application to studies of the Si-SiO₂ interface /
|c by Steven Allan Schwarz
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|c 1979
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|a xii, 166 p. :
|b graphs
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500 |
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|a Submitted to the Department of Electrical Engineering
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502 |
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|g Thesis
|b Ph.D
|c Stanford University
|d 1980.
|
504 |
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|a Includes bibliographical references
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650 |
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0 |
|a Auger effect
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650 |
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0 |
|a Cathode sputtering (Plating process)
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650 |
|
0 |
|a Semiconductor doping
|
650 |
|
0 |
|a Silica
|
650 |
|
0 |
|a Silicon
|x Surfaces
|
710 |
2 |
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|a Stanford University
|b Department of Electrical Engineering.
|
999 |
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|l a809917
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|m auger_sputter_profiling_technique_and_its_application_to_studies_of_th_____1979____________a________________________________________schwarz__s__a______________________p
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|a SPEC-SAL3-U-ARCHIVES
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|c 3781 1980 S
|d Shelving control number
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