Thin film materials : stress, defect formation, and surface evolution /

"Thin films play an important role in many technological applications including microelectronic device, magnetic storage media and surface coatings. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation and surface evolution in thin fil...

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Bibliographic Details
Main Author:	Freund, L. B
Corporate Author:	Alumni and Friends Memorial Book Fund
Other Authors:	Suresh, S (Subra)
Format:	Book
Language:	English
Published:	Cambridge [England] ; New York : Cambridge University Press, 2003 Cambridge, UK ; New York : 2003 Cambridge, [England] ; New York : 2003 New York : 2003 Cambridge, U.K. ; New York : 2003
Subjects:	Thin films

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