Fundamental aspects of ultrathin dielectrics on si-based devices /
| Corporate Authors: | , |
|---|---|
| Other Authors: | , , , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Dordrecht ; Boston :
Kluwer Academic Publishers,
c1998
Dordrecht ; Boston : Kluwer Academic, c1998 |
| Series: | NATO science series High technology ;
v. 47. NATO science series High technology ; vol. 47. |
| Subjects: |