Fundamental aspects of ultrathin dielectrics on si-based devices /
Corporate Authors: | , |
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Other Authors: | , , , |
Format: | Conference Proceeding Book |
Language: | English |
Published: |
Dordrecht ; Boston :
Kluwer Academic Publishers,
c1998
Dordrecht ; Boston : Kluwer Academic, c1998 |
Series: | NATO science series High technology ;
v. 47. NATO science series High technology ; vol. 47. |
Subjects: |