Photonic microsystems : micro and nanotechnology applied to optical devices and systems /
Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. Photonic Microsystems also desc...
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Format: | Book |
Language: | English |
Published: |
New York ; London :
Springer,
2009
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Series: | MEMS Reference Shelf
MEMS reference shelf |
Subjects: |
Internet
This item is not available through BorrowDirect. Please contact your institution’s interlibrary loan office for further assistance.Stanford University
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ISIL:US-CST |
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